The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)
Online ISSN : 2424-3124
2016
Session ID : 2P2-19b2
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Drive and control of a micromachine using a laser-induced microbubble
Sho KUBOTARyotaro IHARAShoji MARUO
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

In this study, we have realized the control of a microrotor using the convection flow around a laser-induced microbubble. To examine the rotation of the microrotor, the temperature distribution and the convection flow around the microbubble were analyzed by finite element analysis. As a result, it was found that the flow direction depended on the position of a microbubble. This phenomenon makes it possible to control the rotational direction of the microrotor. In experiments, a microrotor and two thin plates were fabricated on a glass substrate by two-photon microstereolithography and subsequent electroless copper plating. It was demonstrated that the rotational direction of the microroter was switched by changing the position of the laser-induced bubble. The bubble-driven micromachines will be useful for microfluidic devices such as micropumps and micromixers.

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© 2016 The Japan Society of Mechanical Engineers
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