匂いセンサ応用のためのワイヤレス発振式マルチチャンネルQCMセンサの開発

抄録

This paper reports the development of wirelessly excited multi-channel QCM sensor for odor sensor applications. In this sensor, the excitation electrodes are positioned on a glass plate separate from the QCM. Such electrode configurations are suitable for odor sensor applications because the electrical interconnections between the QCM and the oscillation circuit are simple. We evaluated the dependence of the resonance frequency on the crystallographic orientation. We found out two vibrational modes that depends on each modulus of elasticity and the frequency responses of each mode are linear for mass loading.