電気流体現象を用いた連結式マイクロポンプの研究

抄録

We develop a microfluidic pump which is driven by electrohydrodynamic (EHD) conduction pumping. Ring-shaped pumps were conducted in previous researches on EHD conduction, and they require 3D shapes of electrode pairs. It is difficult for them to miniaturize the devices. Herein we propose a novel fluidic mechanism to obtain one-directional flow in micro-channels with non-parallel electrodes which induce an asymmetric electric field. One of advantages is that the design can be easily and precisely fabricated using microelectromechanical systems (MEMS) processing techniques. In this study, we demonstrate microfluidic pump driven by an EHD conduction, and it is an integration with a micro-channel. We achieved generated pressure of 130 Pa in a micro-field.