液中生体組織計測のためのワイドレンジ水晶振動式力センサプローブ

抄録

In this study, we present the method of improving the sensitivity of the force sensor probe using quartz crystal resonator (QCR) for measurement of the mechanical properties of living samples in liquid environment. Two key factors to improve the sensitivity are reducing the thickness of QCR and increasing the transmission efficiency of force. By using wet etching technique, we succeeded in reducing the thickness of QCR from 41.7 μm to 15 μm. The sensitivity of etched QCR was improved by 4.9 times compared with unetched QCR. The transmission efficiency of force was increased by using principal of leverage, and the results showed that the sensitivity was improved by 8.6 times. Thus, we achieved the high sensitivity and a wide measurement range from 0.58 uN to 50 mN.