多軸駆動による自由曲面への圧電膜塗布

抄録

In the ultrasonic phased array, currently used, the size of the independent vibration element is fixed and the arrangement density is not free. The shape of the phased array is also restricted by the size of it. We have the concept of covering the whole substrate with spray coating of piezoelectric material and applying it to non-contact ultrasonic measurement and manipulation by setting it as an ultrasonic transmitting and receiving point anywhere on the surface of the base material. We aim to fabricate a sheet-like ultrasonic phased array on a large area or curved surface. In this paper, we describe the evaluation results of piezoelectric film coating on curved surface using sol-gel spray method with multi-axis drive apparatus.