金属片持ち梁を用いた表面プラズモン共鳴型光検出器の角度走査法

抄録

This paper reports a simultaneous measurement method of photocurrent by a SPR photodetector and vibration angle of a metal cantilever with a strain gauge. The SPR photodetector and the strain gauge were mounted on the cantilever to integrate an angle scanning mechanism of a spectrometer using the SPR photodetector. A structure of the cantilever designed to be able to change between –15 to +15 degrees to detect peaks of photocurrent by SPR. While irradiating the SPR photodetector with a single wavelength of 1250 nm and vibrating the cantilever, the photocurrent and the angle of the cantilever were measured simultaneously. It was also confirmed that the peak angles of photocurrent by SPR was measured near a theoretical angle.