MEMSを用いたデジタル広帯域ハイドロフォンの製作と評価

抄録

Most of the conventional hydrophones (underwater microphones) use PZT ceramic as the material, and there are problems such as variation in sensitivity, the necessity of high-magnitude amplification and high cost.

We developed and evaluated a low-cost, easy-to-use MEMS hydrophone that is waterproof and pressure-resistant while maintaining the bandwidth of a commercially available MEMS microphone.