画素ごとに光学設計したマイクロレンズアレイのdeep RIEによる製作

抄録

In this study, the method of producing the micro lens array by the MEMS process is proposed. Since the micro lens array is placed on each pixel of the liquid crystal display (LCD), the micro lens array gives directivity in an arbitrary direction for each LCD pixel. Since it is difficult to manufacture the micro lens array designed for each LCD pixel by conventional technology, the micro lens array is produced by using silicon sheets etched by deep reactive ion etching (deep RIE) as a casting mold. The manufactured micro lens array was measured and evaluated using a laser microscope whether it has optically accurate.