The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)
Online ISSN : 2424-3124
2021
Session ID : 2A1-N03
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Evaluation of vibration-induced flow in high bandwidth frequency vibration
*Kohei MORITATakeshi HAYAKAWA
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Abstract

In this paper, we made a piezoelectric actuated XY stage which can be driven in high frequency and evaluated a vibration-induced flow when a high frequency vibration was applied to a chip. The vibration-induced flow is a local flow that is induced around microstructures by applying vibration to a microchip with micropillar array patterns. We use piezoelectric actuated XY stage to apply circular vibration. However, this stage that we use is not able to apply high frequency vibration because the resonance frequency of the stage is low as a few kHz. Thus, the vibration-induced flow induced by applying high frequency was not evaluated. In this study, we evaluated a vibration-induced flow induced by applying high frequency vibration using the stage that we made.

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© 2021 The Japan Society of Mechanical Engineers
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