高周波振動における振動誘起流れの評価

抄録

In this paper, we made a piezoelectric actuated XY stage which can be driven in high frequency and evaluated a vibration-induced flow when a high frequency vibration was applied to a chip. The vibration-induced flow is a local flow that is induced around microstructures by applying vibration to a microchip with micropillar array patterns. We use piezoelectric actuated XY stage to apply circular vibration. However, this stage that we use is not able to apply high frequency vibration because the resonance frequency of the stage is low as a few kHz. Thus, the vibration-induced flow induced by applying high frequency was not evaluated. In this study, we evaluated a vibration-induced flow induced by applying high frequency vibration using the stage that we made.