Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : June 01, 2022 - June 04, 2022
This paper describes a micro scale using a polyimide film-based force plate for measuring the weight of fruit flies. The proposed sensor consists of a spiral coil spring and a laser displacement meter. As a force applied to the center plate, the spiral coil spring bends vertically and generate vertical displacement. By measuring the spring constant and the displacement, the applied force is calculated. We used a polyimide film as the device material so that the force plate realized the low spring constant and high durability at the same time. The fabrication process is easier compared to that of the conventional MEMS force sensors. The spring constant of the fabricated devices were sub-N/m, and the force resolution became less than 0.02 μN.
