低温接合法を用いた高屈折率ガラス基板の接合

抄録

A high refractive index (HRI) glass is a promising material for observing micro-and nano-scale objects under an optical microscope with high spatial resolution. However, HRI glass has not been applied to micro/nanofluidic devices. Typically, fabrication of nanochannels is realized on fused silica glass although the combination of HRI and fused silica glasses is difficult to apply for thermal fusion bonding at high temperature because thermal expansion of HRI is significantly different from that of fused silica. Here, we discuss the bonding capability of HRI glass and fused silica glass with micro- and nano-patterns, at room temperature. Through our room-temperature bonding method, we have achieved to obtain micro and nanochannels formed by two different glass substrates. We have also investigated pressure resistance of the channels and surface properties, surface roughness and surface free energy, of the two glass types.