高電圧誘電スペクトルに基づく誘電液体アクチュエータの動作解析

抄録

Dielectric properties at a few volts are frequently measured to evaluate the reliability of actuators using an LCR meter. Since the charging behavior inside dielectric materials shows non-linearity at high voltage, the analogously applying the properties at low voltage as those at high voltage remains questionable. This paper proposes a method for measuring and analyzing the dielectric spectrum at high voltage.

We fabricated a HASEL (Hydraulically Amplified Self-Healing Electrostatic) actuator and observed its actuation by applying a high DC voltage. At that time, the current response in the process of polarization and depolarization with actuation was acquired. The impedance, tanδ, and Maxwell stress were obtained from the response. These results can be explained qualitatively by considering the shape change due to actuation, indicating the possibility that the proposed method can apply to assess the dielectric and operation characteristics of actuators.