UVナノインプリントを用いた2面コーナーリフレクタアレイの製作

抄録

We investigated a feasibility of fabrication using nanoimprinting for a dihedral corner reflector array (DCRA), which consists of two orthogonal micro-mirrors arranged in an array. We clarified that it is possible to fabricate square pillars of 500 μm width and 1000 μm height with an aspect ratio of 2.0 as micro-mirrors using nanoimprinting. Then, we achieved that 4×4 micro mirror arrays of 2.0 aspect ratio pillars with a 250 μm gap can be fabricated. The results of the shape of the pillars measurement show that the master and the fabricated pillars have a taper of around 2.7° to 3.0°.