Evaluation of Time Response Characteristics of a MEMS Tactile Sensor Combined Piezoelectric Material and Strain Gauge Mimicking Human Tactile Sensation

Abstract

This study reports the design and fabrication of a MEMS tactile sensor that mimics the time response characteristics of human tactile sensation by integrating piezoelectric material and strain gauge as composite sensing elements, and the evaluation of its time response. The response to the application of a time-varying load was evaluated, and it was confirmed that the sensor has the adaptability of human tactile receptors.