抄録
Thermal conductivity distribution is measured with micron spatial resolution but qualitative accuracy by scanning thermal microscopy (SThM) because variation in a tip-sample contact condition strongly affects heat flow rate used for determining thermal conductance. Therefore, we propose a quantitative measurement method of local thermal conductivity by combining thermal and electrical conductance detection methods on the SThM. As preliminary experiments, variations in the two conductances were measured during a force curve mode with the micro-cantilever probe, having thermopile, heater, thermocouple on its body and electrode at a tip. Results shows that electrical conductance was measured unstably and with low reproducibility, and that thermal one has lower dependence on contact load than electrical one.
