抄録
Fundamental study has been performed to develop on Joule-Thomson microcooler which was fabricated on Si wafer by photo fabrication. The microcooler in the present study uses ethylene as a refrigerant. Inlet and outlet gas pressure are set at 2.3MPa and 0.1MPa, respectively. Peltier device was used to condense ethylene. Liquefied ethylene was observed when condenser temperature reached saturation temperature. Evaporator temperature reached 235K with mass flow of 8.9mg/s.
