Abstract
In this paper, we develop a measuring method of nano thermal diode device using Pt nano sensors fabricated by NEMS (Nano electro mechanical systems) technology. Because the thermal conductivity of nano thermal diode has direction dependency, two-way temperature gradient and sensing are needed. So two suspended Pt nano sensors are fabricated, nano thermal diode is bridged between these sensors. One of these Pt nano sensors is electrically heated and temperature gradient is provided to the nano thermal diode. The thermal conductivity is analytically derived and measurement errors are estimated.
