熱工学コンファレンス講演論文集
Online ISSN : 2424-290X
セッションID: B212
会議情報
B212 ナノインプリントにおけるUV硬化樹脂の温度依存性に関する研究(固液相変化を伴う伝熱現象IV)
佐竹 信一金井 高弘米本 幸弘海野 徳幸谷口 淳
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会議録・要旨集 フリー

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抄録
High time-resolution flow measurement of curing process by UV is performed by micro-DHPTV system. The photo-curable resin is packed between the glass plate and the covered glass. The measurement is performed during two seconds; the measurement time is covered for the curing time. The theoretically curing time is estimated from the irradiation flux of UV source. Moreover, photo-curable resin with the changing of temperature is measured to evaluate dependence of temperature. Consequently, the three-dimensional displacement can be obtained by the movement of the tracking particles. The displacement is dominant at the depth direction. The value is in good agreement with the theoretical displacement from UV irradiation flux. Moreover, it is found that the photo curing of the displacement appears to be proportional to increasing the temperature.
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