抄録
In order to measure humidity inside PEFC, we developed flexible and thin film capacitive humidity sensor by micro-electro-mechanical-systems (MEMS) technology. The sensor consists of parylene and Ni. Parylene was selected as an electrical isolating material and also sensing material. Ni electrodes was deposited thinly to obtain water vapor permeability to the sensing material. Sensing area and thickness of the sensor are 4mm^2 and 6.51μm respectively. By the calibration measurement, the sensor has high sensitivity of 31.8%. It means that the sensor has a high reproducibility and small error. Furthermore, the sensor demonstrated a very small hysteresis in the range from 60%RH to 100%RH.
