抄録
We prepared nanocrystalline bismuth-telluride based thin films with various film thicknesses by sputtering method. The temperature amplitude of the each sample was measured by using the 3-omega method at room temperature. By the analysis of film thickness dependence of temperature amplitude, the total thermal resistance of each sample was divided the thin film contribution into the interface contribution (thermal contact resistance). Finally, we estimate the thermal conductivity of the nanocrystalline bismuth-telluride based thin films without the contribution of the thermal contact resistance.
