抄録
This study describes a non-intrusive measurement of the distribution of CO_2 and N_2 concentrations in gas mixture flow by coherent anti-Stokes Raman scattering (CARS) microscopy for the development of a non-intrusive measurement technique in microscale gas flow. The relationship between CO_2/N_2 ratio and CARS intensity generated from CO_2 and N_2 was acquired. Concentrations of both gases were measured at ten different points in the flow channel where CO_2 and N_2 were mixed. The maximum standard deviations of measurement data of CO_2 and N_2 concentrations were 3.90% and 5.58%, respectively. It was shown that the measurement of the gas concentrations in a microscale region (2.5 x 2.5 x 44.5 μm^3) where CARS was generated was realized.
