熱工学コンファレンス講演論文集
Online ISSN : 2424-290X
セッションID: F141
会議情報
F141 赤外線集中加熱法に工夫を加えた浮遊帯溶融法による大形シリコン結晶の育成
綿打 敏司ホサイン エムディー ムクタール長尾 雅則田中 功
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会議録・要旨集 フリー

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抄録
The growth conditions for large bulk silicon crystals were examined using the modified infrared convergent-heating floating zone method. The positions of the mirror-lamp (M-L) systems were systematically shifted from positions close to the molten zone to those more distant than the conventional position. The shape of the grown crystals was found to be affected by the position of the M-L system. When the system was close to the molten zone, crystals with a spiral shape were grown when larger tetragonal feed rods were used. At more distant positions, however, the growth of spiral-shaped crystals was suppressed. Crystals with cylindrical shape were grown.
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© 2014 一般社団法人 日本機械学会
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