抄録
In order to contain the thermal expansion of the positioning device consisting of motor, bearing and ball screw, a special water jacket was designed and made. A cooling system was established to cool the positioning device by circulation temperature-controlled water. During experimental verification, the positioning device is was operated under several motor rotation speed. Temperature profile of the ball screw was measured and the thermal expansion was calculated. As a result, the thermal expansion of the positioning was contained below 10μm