熱検知型 3 軸加速度センサーの応答と精度に関する解析

抄録

Thermal triple-axis accelerometer based on micro-electromechanical systems (MEMS) has a cavity enclosed by an outer wall, thermal detectors and a ring-shaped heater wire in it. The heater warms up the air inside the cavity and generates laminar convection. The heated air moves in the direction of the acceleration because of buoyancy effect. The thermal detectors detect the deviation of temperature caused by the warm moving air. There is a proportional relationship between the change in temperature and the magnitude of acceleration, and hence the accelerometer can detect the direction and magnitude of the acceleration from the temperature change. When the acceleration changes at a certain frequency, it can be calculated from frequency characteristics.