フォノニック結晶ナノ構造による薄膜型シリコン熱電発電デバイスの出力向上

抄録

We demonstrate the power enhancement of silicon thermoelectric generator by using phononic crystal nanostructures. In the recent ICT society, thermoelectric devices attract large interest in energy harvester application. We fabricated membrane-based thermoelectric generator on SOI wafer with electron beam lithography and common MEMS process. We measured thermoelectric voltage and output power from temperature difference while heating sample substrate. Phononic crystal nanostructure improves thermoelectric figure of merit twice for poly-Si membrane, and enhances output power 4 times larger in thermoelectric device.