Improvement in Sensitivity of Bio-Calorimeter with MEMS Thermopile Sensor

Abstract

Improvement in reducing minimum detection level of a bio-calorimeter has been conducted with developing a MEMS thermopile sensor and a multistage isothermal bath. Reduction in a noise level and improvement in long time stability leads to a performance of 20 nW level detection. It was also experimentally demonstrated that the developed bio-calorimeter can measure a growth thermogram of Yeast from a few tens nano-watt level.