抄録
In this report, a new vertical-type profile measuring probe for on-machine measurement was developed. This probe has three key technologies: fiber-type laser interferometric displacement sensor, low measuring force and high rigidity air slide, and direct I/O interface from machine scales. In the vertical-type probe, a gravity cancel port by which the measuring force can be controlled very small is added in the air slide. By using this probe, very high accurate measurement could be achieved successfully on the machine.
