The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2013.62
Session ID : 525
Conference information
525 Observation of the fatigue damage of silicon under compressive stress using electron beam induced current
Toshifumi KITA, Shoji KAMIYA, Hayato IZUMI, Noritsugu UMEHARA, Takayuki TOKOROYAMA, Vu Le Huy, Masatoshi OGAWA
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Keywords: MEMS, EBIC, Single crystalline silicon, Fatigue, Defect, Compressive stress
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© 2013 The Japan Society of Mechanical Engineers
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