The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2013.62
Session ID : 526
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526 Effect of hydrogen on the plastic properties of single crystal silicon
Ryota MUKAIYAMA, Hayato IZUMI, Nobuyuki SHISHIDO, Shoji KAMIYA
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Keywords: Single crystal silicon, Plastic deformation, Hydrogen, Nanoindentation
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© 2013 The Japan Society of Mechanical Engineers
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