The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2013.62
Session ID : 601
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601 Preparation of TEM specimen by the technique of abrasive material removal
Yutaka TAKAHASHI, Yukiomi SUZUKI
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Keywords: Abrasive technique, Grinding, Polishing, TEM specimen, Material damage, Silicon, Graphite
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© 2013 The Japan Society of Mechanical Engineers
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