The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2013.62
Session ID : 210
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210 Contactless measurement and quantitative evaluation of the electrical characteristics of doped GaAs wafers using microwaves
Takahiro YOSHIDA, Atsushi HOSOI, Yang JU
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Keywords: Microwave, GaAs, Electrical Characteristic, Contactless Measurement
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© 2013 The Japan Society of Mechanical Engineers
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