抄録
In this paper, size effects on the mechanical properties of micro materials will be reviewed. Properties that will be addressed include yield strength, fatigue and creep behavior and fracture toughness of thin metallic films as studied by several specialized testing techniques including : (i) micro-tensile testing for yield strength and low cycle fatigue, (ii) nanoindentation and microbeam deflection for high cycle fatigue, and (iii) thermal cycling experiments for creep and fracture toughness. Cu thin films were investigated in all studies, only the fracture toughness experiments were carried out on NiAl thin films
