半導体材料・デバイスの最新の進展

1. 酸化物半導体の物性とデバイス応用

抄録

This paper reviews physical properties and device applications of oxides, especially corundum-structured oxides. Oxides had been considered as unwelcome interruptions in puddling cupper or iron at first. However, after the invention of barium titanate, it begun to attract attentions for their varied functions. As well as an evolution of fabrication techniques and equipment, it could be realized to fabricate high-quality oxide thin films free from impurities. Various physical functions in oxides have been unraveled. Furthermore, in these days, meta-stable oxides can be grown under atmosphere at low temperature by mist CVD method. Corundum-structured oxides has been gathering much attentions for these abilities for electrical device applications.