準安定相(非平衡)酸化物の作製と物性

抄録

It has been a hard work to synthesize metastable or non-equilibrium compounds because they usually can be obtained under high temperatures and high pressures. However, mist CVD technique has potentials to develop new synthesis routes of them. Metastable or non-equilibrium oxides were fabricated under atmosphere or relatively lower temperatures of 500 °C. The key method is a choice of crystal structures of substrates. Crystal structures of thin films fabricated by mist CVD method are strongly influenced by the crystal structure of substrates, because their growth energies are relatively low. Mechanical stress from substrates strongly rock the crystal structures of thin films.