抄録
The concentration and diffusion coefficient of hydrogen in palladium films coated on iron have been measured by an electrochemical method. Palladium films were deposited by RF sputtering. In the cases of film thickness of 0.05-1.36μm and specimen thickness of 0.1-0.8mm, most of hydrogen absorbed in the specimen were dissolved in the palladium film, and hydrogen permeation through the specimens with thin film layers was governed by permeation through iron. The solubility of hydrogen in the film was nearly equal to that in an annealed bulk specimen of palladium. The diffusion coefficient of hydrogen was 4.3×10-13m2/sec in the film of α-phase at 298K, which was about 2 orders of magnitude lower than that in the bulk specimen.
