抄録
This paper outlines general aspects of helium-based glow barrier discharge, and its application to the production of carbon nanotube (CNT). The minimum requirements for CNT growth are: (1) a H2/CH4 ratio of at least higher than five (He ˜ 90%), (2) a substrate temperature of above 600°C, (3) an intense negative glow formed near the substrate. The current project focuses on the improvement of the stability of atmospheric pressure glow discharge, and on the development of silicon devices equipped with well-aligned CNT synthesized in very controlled manner.
