抄録
Laminar-type varied-line-spacing gratings have been widely used for soft x-ray monochromator recently because of the features of low stray lights and higher order lights. We have developed an advanced holographic recording and an ion-beam etching methods for the laminar type varied-line spacing gratings. This report describes a short review of the soft x-ray spectrometers using varied-line-spacing gratings, the fabrication process of the laminar-type holographic gratings, and the performance of the flat field spectrographs equipped with the laminar type varied-line spacing gratings comparing with the mechanically ruled replica gratings. It is concluded that, for the sake of the advanced design and fabrication processes and excellent spectroscopic performance, laminar-type holographic gratings will be widely used for soft x-ray spectrometers for various purposes in the near future.
