プラズマ・核融合学会誌
Print ISSN : 0918-7928
Rapid Communications
Observation of the Electric Field Structure in the Sheath of Electronegative Plasmas by Laser-Induced Fluorescence-Dip Spectroscopy
Kazuki TAKIZAWAKoichi SASAKI
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2004 年 80 巻 1 号 p. 3-4

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We have measured the distribution of the electric field in the sheath formed between electronegative Ar⁄SF6 plasmas and a biased electrode by laser-induced fluorescence-dip spectroscopy. It has been found for the first time that the electric field in the sheath of an electronegative plasma has a multistage structure, which may be due to the reflections of negative ions and electrons at different distances from the electrode surface.
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© 2004 by The Japan Society of Plasma Science and Nuclear Fusion Research
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