スマートプロセス学会誌
Online ISSN : 2187-1337
Print ISSN : 2186-702X
ISSN-L : 2186-702X
液相拡散接合における粒子構造が接合強度に及ぼす影響
高尾 蕗茜石谷 伸治古澤 彰男大橋 直倫日野 裕久
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2023 年 12 巻 5 号 p. 238-245

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With the evolution of power device elements, there is a demand for bonding materials that can bond devices with low thermal stress and realize high heat resistance bonding that supports high temperature operation. We propose a new bonding material that achieves high heat resistance in a low-temperature, short-time process by using metal fine particles and based on the characteristics of fine particles and the concept of liquid-phase diffusion bonding. In this study, we investigated the relationship between the metal composition in the bonding material and the bonding strength for bonding materials using SnBi and Cu, and reported that the particle structure affects the formation of the bonding layer.
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