Journal of Smart Processing
Online ISSN : 2187-1337
Print ISSN : 2186-702X
ISSN-L : 2186-702X
Sintering of Conductive Cu Nano Ink by Photo-sintering Process and Observation of Interface between Cu Film and PI
Yuichi KAWATOHidetoshi ARIMURATomio KUDO
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2013 Volume 2 Issue 4 Pages 173-177

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Abstract
  The conductive Cu nano ink can be printed by ink-jet printing on polyimide substrate, and then photo-sintered in the air atmosphere within 1 second. In the present work, the spin coated Cu nano ink on polyimide substrate was photo-sintered under various conditions. The microstructures of the sintered Cu films were observed by scanning electron microscopy. Neck formation and grain growth were promoted with increasing of irradiation energy. The mechanism of the photo-sintering process is studied in comparison with a firing process in nitrogen atmosphere. The obtained Cu film by photo-sintering process has low resistivity of 3μΩ·cm and good adhesion vs. polyimide. In contrast, the sintered Cu film by firing process in nitrogen atmosphere has high resistivity of 15μΩ·cm and poor adhesion. It was suggested that good adhesion between Cu film and polyimide is contributed by the bite into the substrate.
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© 2013 Smart Processing Society for Materials, Environment & Energy
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