抄録
Laser Induced Forward Transfer (LIFT) of metal was performed to directly write the micro deposited pattern using KrF Excimer laser in this study. Effects of conditions of laser irradiation on the deposited pattern were investigated. Time resolved imaging of laser-induced plume was also performed. Electric resistance of deposited micro wires was measured to investigate the possibility for the application of the LIFT. We found smaller film-substrate distance or smaller laser spot size enables better spatial resolution of deposited pattern. Electric resistance of the micro-wire patterned was almost equivalent to that fabricated using other direct writing methods such as laser CVD.
