Journal of Smart Processing
Online ISSN : 2187-1337
Print ISSN : 2186-702X
ISSN-L : 2186-702X
Plasma Technologies for Soft-Material Processes～From Low-Temperature Low-Damage Processes to Plasma Medicine～
Yuichi SETSUHARA
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Keywords: Plasma Processing, Soft Materials, Plasma-Enhanced Sputtering, Plasma Medicine
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2014 Volume 3 Issue 1 Pages 23-29

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© 2014 Smart Processing Society for Materials, Environment & Energy
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