紫外線レーザ造形によるアルミナ製マイクロ構造の作製

抄録

A novel additive manufacturing technique was developed to create ceramic components using ultraviolet laser lithography. Twodimensional cross-sectional patterns were created through dewaxing by ultraviolet laser drawing on spread resin paste including ceramic nanoparticles, and three-dimensional composite models were sterically printed by layer lamination though powder sintering. Alumina particles with average diameter of 500 nm were dispersed in liquid resins at 60% volume fraction. The paste was spread on a glass substrate at 100 μm layer thickness. Perhaps you mean “An ultraviolet laser beam with wavelength of 355 nm and diameter of 100 μm was used to scan the pasted resin surface at speeds of 100 to 200 mm/s. Irradiation power was changed from 700 to 800 mW. Numerical lattice dimensions in the obtained geometric patterns and material microstructures in alumina components were measured and observed by digital optical and scanning electron microscopies. Alumina microlattices with 97.4% sintered density were obtained through optimized laser drawing. Fine alumina microstructures without cracks or pores were obtained through heat treatment at 1300℃ for 2 h after laser lithography. The relative density reached 99.5%. The measured dimensions of microlattices were compared with the numerical data of the original graphic design. The average dimensional tolerance was within 5 μm.