金属塩化物ならびに酸化物からのGa・1次イオンTOF-SIMSフラグメントパターンの推定

抄録

Gallium ion TOF-SIMS fragment patterns from some metal-chlorides and -oxides can be qualitatively inferred. Considering the electron affinities of Cl and O, comparatively higher than those of other metal elements, rules of nx ≥ (y + 1) for positive ions and nx ≤ (y + 1) for negative ions were introduced and applied to infer the fragment patterns of metal-chlorides, M_xCl_y, where the oxidation number of metal M is n. For oxides, M_xO_y (oxidation number of metal M is n), the rules used to infer the fragment patterns nx ≥ (2y + 1) for positive ions and nx ≤ (2y + 1) for negative ions. Further, the effect of water on the surfaces of chlorides and oxides, and the fragment patterns of some metal-nitrates are discussed.