特集：低エネルギー電子顕微鏡/光電子顕微鏡の開発と応用
SPring-8における高エネルギー光電子顕微鏡の開発研究
2002 年 23 巻 5 号 p. 285-291
詳細
2002 年 23 巻 5 号 p. 285-291
Photoemission electron microscopy (PEEM) using ultraviolet light has been developed for imaging the surface chemical reactions. Recently, the combination of the PEEM techniques and the synchrotron radiation (SR) light, vacuum-ultraviolet (VUV) or low-energy soft X-ray, enables us to image the surface chemical states by detecting the photoelectrons from shallow core levels. Our PEEM system using higher energy X-ray at SPring-8 BL15XU was designed in order to make the identification of XPS peaks easy and to obtain photoelectrons from deeper layers or interfaces. In this work, we indicate the detail of PEEM objective lens that covers keV electrons excited by high energy SR light.
