高湿度雰囲気下でのプローブ顕微鏡によるサブピコアンペア微小電流計測

抄録

Detection of pA order minute current by scanning probe microscopy encounters some problems under high humidity atmospheres, such as the increased background level and the poor reproducibility, because of the surface leak current. We were able to overcome these problems by using hermetic sealing and keeping the whole electronics equipment in a humidity-controlled atomic force microscope system. Detection of minute current of sub-pA level has been achieved even under high humidity atmospheres.