カーボンナノチューブ電界放射冷陰極を搭載した高分解能X線顕微鏡の開発

抄録

A high resolution X-ray microscope equipped with a multi-walled carbon nanotube cathode was developed. This system has ordinary scanning electron microscopy functions available for the precise adjustment of focusing conditions including astigmatism and an alignment of an electron beam. By the adoption of a transmission type, X-ray images with high magnification can be easily obtained. The diameter of an electron probe, which is one of the factors limiting a spatial resolution of X-ray microscopes, was estimated to be about 270 nm from a resolution of obtained SEM images. Clear X-ray images with the resolution higher than 400 nm were successfully obtained.