特集：高性能電子源が拓く分析装置・計測技術
FEAとHARP光電変換膜を適用した小型超高感度撮像デバイスの開発
2008 年 29 巻 11 号 p. 707-712
詳細
2008 年 29 巻 11 号 p. 707-712
A 640×480 pixel image sensor, which consisted of an integrated field emitter array (FEA) equipped with an active drive circuit and a high-gain avalanche rushing amorphous photoconductor (HARP) film, in close proximity to each other, was fabricated and tested as a step toward the development of ultrahigh-sensitivity compact image sensors. Our experimental results revealed that the prototype sensor provided both high sensitivity due to the avalanche multiplication effect of the HARP film and sufficient resolution as a VGA image sensor.
