走査プローブ法によるリソグラフィーの方向性

ナノ構造の構築からその物性や機能の計測へ

抄録

About 10 years have passed since the first demonstration of atom manipulation by scanning tunneling microscopy (STM) was made, and it has become possible to fabricate variously designed nanostructures using scanning probe microscopy (SPM's) including STM. If we consider the next 10 years in this field, it will become most important to measure the functional properties of fabricated nano-structures and therefore to develop new methods that make such measurements possible. In this paper, three new methods developed by the authors are described, which are an independently-driven-double-tip STM, a photon-detecting STM, and a spin-polarized STM of a new mode.